Introduction to Microfabrication

✍ Scribed by Sami Franssila

• Year: 2004
• Tongue: English
• Leaves: 422
• Edition: 1
• Category: Library

✦ Synopsis

Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than device physics * In-depth discussion on process integration showing how processes, materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication. This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.

✦ Table of Contents

cover......Page 1
Contents......Page 6
Preface......Page 16
PART I: INTRODUCTION......Page 22
1 Introduction......Page 24
2 Micrometrology and Materials Characterization......Page 38
3 Simulation of Microfabrication Processes......Page 48
PART II: MATERIALS......Page 54
4 Silicon......Page 56
5 Thin-Film Materials and Processes......Page 68
6 Epitaxy......Page 86
7 Thin-film Growth and Structure......Page 94
PART III: BASIC PROCESSES......Page 112
8 Pattern Generation......Page 114
9 Optical Lithography......Page 120
10 Lithographic Patterns......Page 128
11 Etching......Page 140
12 Wafer Cleaning and Surface Preparation......Page 154
13 Thermal Oxidation......Page 164
14 Diffusion......Page 174
15 Ion Implantation......Page 180
16 CMP:Chemical-Mechanical Polishing......Page 186
17 Bonding and Layer Transfer......Page 194
18 Moulding and Stamping......Page 204
PART IV: STRUCTURES......Page 212
19 Self-aligned Structures......Page 214
20 Plasma-etched Structures......Page 220
21 Wet-etched Silicon Structures......Page 226
22 Sacrificial and Released Structures......Page 238
23 Structures by Deposition......Page 248
PART V: INTEGRATION......Page 256
24 Process Integration......Page 258
25 CMOS Transistor Fabrication......Page 276
26 Bipolar Technology......Page 290
27 Multilevel Metallization......Page 298
28 MEMS Process Integration......Page 308
29 Processing on Non-silicon Substrates......Page 322
PART VI: TOOLS......Page 328
30 Tools for Microfabrication......Page 330
31 Tools for Hot Processes......Page 336
32 Vacuum and Plasmas......Page 342
33 Tools for CVD and Epitaxy......Page 350
34 Integrated Processing......Page 358
PART VII: MANUFACTURING......Page 362
35 Cleanrooms......Page 364
36 Yield......Page 370
37 Wafer Fab......Page 376
PART VIII: FUTURE......Page 382
38 Moore's Law......Page 384
39 Microfabrication at Large......Page 394
Appendix A: Comments and Hints to Selected Problems......Page 402
Appendix B: Constants and Conversion Factors......Page 408
Index......Page 412
Eagle Hill......Page 422