Introduction to Microfabrication

✍ Scribed by Sami Franssila

• Publisher: Wiley
• Year: 2010
• Tongue: English
• Leaves: 509
• Edition: 2
• Category: Library

✦ Synopsis

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered.

This second edition includes:

• expanded sections on MEMS and microfluidics related fabrication issues
• new chapters on polymer and glass microprocessing, as well as serial processing techniques
• 200 completely new and 200 modified figures
• more coverage of imprinting techniques, process integration and economics of microfabrication
• 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems
• solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book

With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.

✦ Table of Contents

Front Matter
Contents
Preface to the First Edition
Preface to the Second Edition
Acknowledgements
1 Introduction
2 Micrometrology and Materials Characterization
3 Simulation of Microfabrication Processes
4 Silicon
5 Thin-Film Materials and Processes
6 Epitaxy
7 Advanced Thin Films
8 Pattern Generation
9 Optical Lithography
10 Advanced Lithography
11 Etching
12 Wafer Cleaning and Surface Preparation
13 Thermal Oxidation
14 Diffusion
15 Ion Implantation
16 CMP: Chemical-Mechanical Polishing
17 Bonding
18 Polymer Microprocessing
19 Glass Microprocessing
20 Anisotropic Wet Etching
21 Deep Reactive Ion Etching
22 Wafer Engineering
23 Special Processes and Materials
24 Serial Microprocessing
25 Process Integration
26 MOS Transistor Fabrication
27 Bipolar Transistors
28 Multilevel Metallization
29 Surface Micromachining
30 MEMS Process Integration
31 Process Equipment
32 Equipment for Hot Processes
33 Vacuum and Plasmas
34 CVD and Epitaxy Equipment
35 Cleanrooms
36 Yield and Reliability
37 Economics of Microfabrication
38 Moore’s Law and Scaling Trends
39 Microfabrication at Large
Appendix A Properties of Silicon
Appendix B Constants and Conversion Factors
Appendix C Oxide and Nitride Thickness by Color
Index