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Intrinsic stress measured on ultra-thin amorphous carbon films deposited on AFM cantilevers

โœ Scribed by Lemoine, P.; Zhao, J.F.; Bell, A.; Maguire, P.; McLaughlin, J.


Book ID
122410621
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
500 KB
Volume
10
Category
Article
ISSN
0925-9635

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