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Intrinsic stress analysis of sputtered carbon film

✍ Scribed by 刘丽琴, 刘丽琴; 王占山, 王占山; 朱京涛, 朱京涛; 张众, 张众; 谭默言, 谭默言; 黄秋实, 黄秋实; 陈锐, 陈锐; 徐敬, 徐敬; 陈玲燕, 陈玲燕; Liqin Liu, Liqin Liu

No coin nor oath required. For personal study only.

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