Intrinsic gettering by oxide precipitate induced dislocations in Czochralski Si

✍ Scribed by Tan, T. Y.; Gardner, E. E.; Tice, W. K.

• Book ID: 121798936
• Publisher: American Institute of Physics
• Year: 1977
• Tongue: English
• Weight: 410 KB
• Volume: 30
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.89340