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Intracavity Laser Spectroscopy: Plasma Diagnostics and Spectral Analysis (Review)

✍ Scribed by V. S. Burakov; S. N. Raikov

Book ID
110397860
Publisher
Springer US
Year
2002
Tongue
English
Weight
277 KB
Volume
69
Category
Article
ISSN
0021-9037

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H, (Balmer) spectral absorption profiles are obtained for 13.56 MHz rfdischarges of hydrogen at pressures from 25 mTorr to 3.0 Torr. The H, transitions are monitored by intracavity laser spectroscopy using high spectral resolution. Spatially resolved concentrations of atomic hydrogen in the n = 2 st