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Interstitial hydrogen and neutralization of shallow-donor impurities in single-crystal silicon

✍ Scribed by Johnson, N. M.; Herring, C.; Chadi, D. J.


Book ID
121869546
Publisher
The American Physical Society
Year
1986
Tongue
English
Weight
406 KB
Volume
56
Category
Article
ISSN
0031-9007

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A mass spectrometer examination of the permeability of the elements silicon and germanium to the gases hydrogen and helium has been carried out in the temperature range 967-1207Β°C for silicon and 766-930Β°C for germanium. Using certain crystal growing and cutting techniques two kinds of diffusion ce