On the permeation of hydrogen and helium in single crystal silicon and germanium at elevated temperatures

✍ Scribed by A. Van Wieringen; N. Warmoltz

• Book ID: 104162418
• Publisher: Elsevier Science
• Year: 1956
• Weight: 777 KB
• Volume: 22
• Category: Article
• ISSN: 0031-8914
• DOI: 10.1016/s0031-8914(56)90039-8

✦ Synopsis

A mass spectrometer examination of the permeability of the elements silicon and germanium to the gases hydrogen and helium has been carried out in the temperature range 967-1207°C for silicon and 766-930°C for germanium.

Using certain crystal growing and cutting techniques two kinds of diffusion cells were made by each of which it was possible to determine both diffusion coefficient and solubility as well as the activation energies of diffusion and solution from non-steadystate permeation measurements. No permeation of the gases neon, argon and nitrogen could be detected. It seems that hydrogen in silicon can occur both in elemental form and as a compound. The elemental form diffuses easily and consists mainly of atoms or protons.