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Internal stress of vapour-deposited aluminium on aluminium substrate films: Effect of O2 and water incorporated in the substrate

✍ Scribed by R. Abermann

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 519 KB
Volume: 188
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(90)90301-s

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