Internal stress in MPCVD diamond films on the Si substrate based on XRD line shape

✍ Scribed by Xiao-wei Li; Cui-ping Li; Cheng-yao Gao; Meng-xue Huang; Bao-he Yang

• Book ID: 107509624
• Publisher: Tianjin University of Technology
• Year: 2009
• Tongue: English
• Weight: 136 KB
• Volume: 5
• Category: Article
• ISSN: 1673-1905
• DOI: 10.1007/s11801-009-8214-8