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Internal stress in aluminium oxide, titanium carbide and copper films obtained by planar magnetron sputtering

✍ Scribed by Kaizo Kuwahara; Tsunetaka Sumomogi; Mitsunori Kondo

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 350 KB
Volume: 78
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(81)90416-8

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Internal stresses in Cr, Mo, Ta and Pt f

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📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 177 KB