Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling

✍ Scribed by Biberger, Roland; Benstetter, Guenther; Schweinboeck, Thomas; Breitschopf, Peter; Goebel, Holger

• Book ID: 108210760
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 746 KB
• Volume: 48
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/j.microrel.2008.06.013