Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling

✍ Scribed by Peter Breitschopf; Günther Benstetter; Bernhard Knoll; Werner Frammelsberger

• Book ID: 108210580
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 855 KB
• Volume: 45
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/j.microrel.2005.07.047