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Intermetallic Formation in PZT for MEMS Structures

✍ Scribed by Sharma, Kanu priya; Oseroff, Thomas; Lunardi, Leda

Book ID
118148119
Publisher
Cambridge University Press
Year
2012
Weight
667 KB
Volume
1427
Category
Article
ISSN
0272-9172

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## Abstract Stiction, or adhesion of components to one another, is a major failure mechanism in surface micromachined MEMS. In this paper we discuss roughening of the surface of polysilicon, which forms the structural layer in surface micromachining, by the formation of porous silicon and its effec