Interficial stability of Cu/Cu(Ru)/Si contact system for barrier-free copper metallization

✍ Scribed by Ying Wang; Mi-lin Zhang; Fei Cao; Yun-tao Liu; Lei Shao

• Book ID: 116608335
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 557 KB
• Volume: 509
• Category: Article
• ISSN: 0925-8388
• DOI: 10.1016/j.jallcom.2011.02.150