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Interferometric profiling of microcantilevers in liquid

✍ Scribed by Jason Reed; Joanna Schmit; Sen Han; Paul Wilkinson; J.K. Gimzewski


Book ID
103875197
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
898 KB
Volume
47
Category
Article
ISSN
0143-8166

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✍ James C. Wyant; Katherine Creath πŸ“‚ Article πŸ“… 1992 πŸ› Elsevier Science 🌐 English βš– 470 KB

This paper disctu;ses some advances in non-contact, interferometric optical profilers. Topics discussed include: (i) The advantages of using a white light source, rather than a laser source, (ii) The tradeoff between the use of Michelson, Mirau, and Linnik interferometers for different fields of vie