Advances in interferometric optical profiling

✍ Scribed by James C. Wyant; Katherine Creath

• Book ID: 103924392
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 470 KB
• Volume: 32
• Category: Article
• ISSN: 0890-6955
• DOI: 10.1016/0890-6955(92)90053-j

✦ Synopsis

This paper disctu;ses some advances in non-contact, interferometric optical profilers. Topics discussed include: (i) The advantages of using a white light source, rather than a laser source, (ii) The tradeoff between the use of Michelson, Mirau, and Linnik interferometers for different fields of view and different lateral resolutions, and.(iii) Techniques for removing errors in the reference surface enabling a person to measure sub-Angstrom surface microstructure in the presence of a much rougher reference surface,,.