## Abstract ErSiO superlattice crystal (SC) waveguide is demonstrated. ErSiOβSC film was formed on a SiO~2~/Si substrate. After the ErSiO preform formation by solβgel method, high temperature anneal for the crystallization was performed in Ar atmosphere. Then the ErSiOβSC layer thickness is 220 nm.
β¦ LIBER β¦
Interference field of a system of optical waveguide emitters
β Scribed by V. F. Dubrovin
- Book ID
- 111451958
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2010
- Tongue
- English
- Weight
- 172 KB
- Volume
- 55
- Category
- Article
- ISSN
- 1064-2269
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