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Interface structure of photonic multilayers prepared by plasma enhanced chemical vapor deposition

✍ Scribed by Hyeonjae Kim; Mark D. Foster; Hao Jiang; Scott Tullis; Timothy J. Bunning; Charles F. Majkrzak


Book ID
108247754
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
378 KB
Volume
45
Category
Article
ISSN
0032-3861

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Structure of copolymer films created by
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The interface structure in copolymer films made using plasma enhanced chemical vapor deposition (PECVD) has been probed for the first time using X-ray reflectivity. Copolymer films made from comonomers benzene (B), octafluorocyclobutane (OFCB), and hexamethyldisiloxane (HMDS) show extremely sharp in