✦ LIBER ✦

Interface strain profiling in ultrathin SiO2 gate oxides with medium energy ion scattering spectroscopy

✍ Scribed by D.W. Moon; H.I. Lee

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High-resolution depth profiling of ultra

✍ T Gustafsson; H.C Lu; B.W Busch; W.H Schulte; E Garfunkel 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 489 KB