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Interface properties of a-C:H/a-SiOx:H multilayers

✍ Scribed by Cui Jingbiao; Zhang Weiping


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
123 KB
Volume
42
Category
Article
ISSN
0042-207X

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\(\mu \mathrm{c}-\mathrm{Si}: \mathrm{H} / \mathrm{a}-\mathrm{Si}: \mathrm{H}\) multilayers have been fabricated with an rf glow-discharge method in which two coupling types of \(\mathrm{if}\) electrodes were used independently by turns without altering the composition of the reactive gases. This sp