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Interface diffusion of sputtered CoZrNb films on silicon substrate

✍ Scribed by LI, X; WANG, L; YANG, J; ZENG, F; PAN, F

Book ID: 122384099
Publisher: Nonferrous Metals Society of China
Year: 2006
Tongue: English
Weight: 338 KB
Volume: 25
Category: Article
ISSN: 1001-0521
DOI: 10.1016/S1001-0521(08)60048-0

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