Morphology of Si surfaces sputter-eroded
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K. Zhang; H. Hofsรคss; F. Rotter; M. Uhrmacher; C. Ronning; J. Krauser
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Article
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2009
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Elsevier Science
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English
โ 999 KB
Sputter erosion of Si generates nanoscale ripple patterns which are stable at ambient conditions and which may serve as an experimental test of ripple formation theories. Up to now, almost all studies on ripple formation of Si-surface have been carried out with large ion-fluence (varying from 10 17