Interaction of copper organometallic precursors with barrier layers of Ti, Ta and W and their nitrides: a first-principles molecular dynamics study

✍ Scribed by Eduardo Machado; Marcin Kaczmarski; Benoît Braida; Pablo Ordejón; Diwakar Garg; John Norman; Hansong Cheng

• Publisher: Springer-Verlag
• Year: 2007
• Tongue: English
• Weight: 434 KB
• Volume: 13
• Category: Article
• ISSN: 1610-2940
• DOI: 10.1007/s00894-007-0187-6