✦ LIBER ✦

Integrated vacuum sensor

✍ Scribed by A.W. Van Herwaarden; P.M. Sarro; H.C. Meijer

Publisher: Elsevier Science
Year: 1985
Weight: 692 KB
Volume: 8
Category: Article
ISSN: 0250-6874
DOI: 10.1016/0250-6874(85)85002-2

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Integrated thermal vacuum sensor with ex

Integrated thermal vacuum sensor with extended range

✍ AW van Herwaarden; PM Sarro 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 559 KB

New Pirani vacuum sensor has integral tr

New Pirani vacuum sensor has integral transmitter

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 343 KB

Integrated flow friction sensor

✍ B.W. Van Oudheusden; J.H. Huijsing 📂 Article 📅 1988 🏛 Elsevier Science ⚖ 655 KB

Integrated-optic ammonia sensor

✍ R. Klein; E. Voges 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 424 KB

ISFET integrated sensor technology

✍ Pavel Neužil 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 434 KB

ISFETs have been fabricated using a modified CMOS silicon-gate 5 pm P-well process. The technology flow and ISFET cross sections are designed with a view to achieving as low a light sensitivity as possible. Three different ISFET structures are suggested; they are simulated using SUPREM and PISCES2B

Integrated optical interferometer gas se

Integrated optical interferometer gas sensor

✍ Chen Fushen; Liang Qu; Liu Yunqi; Xu Yu 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 262 KB

## A novel Ti:LiNbO, integrated optical channel waveguide toxic gas sensor is demonstrated, and gas sensing is observed for NO, by means of the detection of an optical output. The device is constructed in a Mach-Zehnder interferometer geomety with a Langmuir-Blodgett (LB) film cover with chemically