Integrated rotating-compensator polarimeter for real-time measurements and analysis of organometallic chemical vapor deposition

✍ Scribed by K. Flock; S.-J. Kim; M. Asar; I.K. Kim; D.E. Aspnes

• Book ID: 113936793
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 614 KB
• Volume: 455-456
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2004.01.069