✦ LIBER ✦

Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation

✍ Scribed by De Brabander, Gregory N. ;Beheim, Glenn ;Boyd, Joseph T.

Book ID: 115347103
Publisher: The Optical Society
Year: 1998
Tongue: English
Weight: 152 KB
Volume: 37
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.37.003264

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