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Integrated multilayer high aspect ratio milliactuators

✍ Scribed by L.S. Fan; S.J. Woodman; L. Crawforth

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 883 KB
Volume: 48
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(95)01002-5

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