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Integrated design of the feedback controller and topography estimator for atomic force microscopy

โœ Scribed by Kuiper, S.; Van den Hof, P.M.J.; Schitter, G.

Book ID
122448413
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
725 KB
Volume
21
Category
Article
ISSN
0967-0661

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The surface topography development of InP as a function of ion energy and incident angle was investigated O 2 ' using atomic force microscopy (AFM). Cone formation was found to be the dominant surface feature under various ion bombarding conditions. However, variations in the density and size of the