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Intake and radiation of atoms in hot hollow cathode discharge

✍ Scribed by T. M. Gorbunova; O. P. Semenova


Publisher
Springer US
Year
1970
Tongue
English
Weight
468 KB
Volume
12
Category
Article
ISSN
0021-9037

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✍ D Zhechev; S Atanassova πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 271 KB

The atomisation and optogalvanic (OG) properties of Ar-Mg a hollow cathode discharge (HCD) plasma are analysed. Under operating conditions of an Ar gas pressure of 39.8 Pa and a discharge current of 10 mA the real sputtering coefficient and the density of the magnesium atoms are calculated to be S k