We report on the pulsed-laser deposition of high-K praseodymium oxide films onto Si(1 0 0) surfaces by laser-ablating a sintered Pr 6 O 11 target. Optical microscope, SEM, and AFM investigations reveal two kinds of Pr x O y -surface structures, which are identified as: (a) large-scaled particles, an
✦ LIBER ✦
Initial stages of praseodymium oxide film formation on Si(0 0 1)
✍ Scribed by H.-J. Müssig; J. Da̧browski; K. Ignatovich; J.P. Liu; V. Zavodinsky; H.J. Osten
- Book ID
- 117216503
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 474 KB
- Volume
- 504
- Category
- Article
- ISSN
- 0039-6028
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