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Initial growth of nanocrystalline diamond/β-SiC composite films: A competitive deposition process

✍ Scribed by Srikanth, Vadali. V. S. S.; Tan, M. H.; Jiang, X.


Book ID
120527032
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
535 KB
Volume
88
Category
Article
ISSN
0003-6951

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Versatile properties of nanocrystalline
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## Abstract In this paper, we discuss on the versatility of nanocrystalline diamond (NCD) film properties as a function of the process parameters aiming to properly fulfil the requirements for various applications. NCD films are achieved in Ar/H~2~/CH~4~ microwave discharges. Their characteristics