Optical emission spectroscopy of deposition process of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films by using a coaxial arc plasma gun

✍ Scribed by Hanada, Kenji; Nishiyama, Takashi; Yoshitake, Tsuyoshi; Nagayama, Kunihito

• Book ID: 123306860
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 800 KB
• Volume: 19
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2010.02.019