𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Initial formation process of metal/silicon interfaces

✍ Scribed by Akio Hiraki

Book ID
104194439
Publisher
Elsevier Science
Year
1986
Weight
44 KB
Volume
168
Category
Article
ISSN
0167-2584

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πŸ“œ SIMILAR VOLUMES

Characterization of chemical interdiffus
Characterization of chemical interdiffusivities at silicon/metal interfaces in initial reaction stages
✍ A Zalar; S Hofmann; P Panjan πŸ“‚ Article πŸ“… 1997 πŸ› Elsevier Science 🌐 English βš– 361 KB

## In order to study the reactivity of Si/Me interfaces, seven model thin-film systems with Me = Al, Ni, Co, Cr, Zr, MO or Wand with a total thickness between 110 and 200nm were prepared by sputter deposition on smooth Sill 11) substrates. The samples were heated using a linear temperature increase