Infrared Study of Proton Implanted GaP Single Crystals
β Scribed by Dr. H. Sobotta; Dr. H. Neumann; Dr. V. Riede; Dr. C. Ascheron; Dr. M. J. Nobes
- Publisher
- John Wiley and Sons
- Year
- 1988
- Tongue
- English
- Weight
- 286 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0232-1300
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## Abstract Both pβtype and nβtype CuInSe~2~ single crystals were implanted with 40 keV ^130^Xe^+^ ions up to doses of 5 Β· 10^16^ cm^β2^. Implanted layers on pβtype substrates showed an initial increase of the resistivity followed by a continuous decrease of the resistivity at higher doses. Implant