Infrared spectroscopic study of thermal annealing effects of hydrocarbon species on a Si surface exposed to methane plasma

✍ Scribed by Masanori Shinohara; Keitaro Iwatsuji; Teruaki Katagiri; Hiromichi Shibata; Yoshinobu Matsuda; Hiroshi Fujiyama

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 255 KB
• Volume: 252
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2005.11.075