Investigation of evolution hydrocarbon species on a Si surface during methane plasma with and without substrate bias, using infrared spectroscopy in multiple internal reflection geometry

✍ Scribed by Masanori Shinohara; Hiromichi Shibata; Ken Cho; Tatsuyuki Nakatani; Keishi Okamoto; Yoshinobu Matsuda; Hiroshi Fujiyama

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 606 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.01.067