Infrared-laser induced production of silicon coating via reaction of silane with trifluoroacetic acid

✍ Scribed by J. Pola; Z. Bastl; J. Tláskal

• Book ID: 103106587
• Publisher: Elsevier Science
• Year: 1990
• Weight: 240 KB
• Volume: 30
• Category: Article
• ISSN: 0020-0891
• DOI: 10.1016/0020-0891(90)90052-w