Laser-induced decomposition of trimethyl(methoxy)silane, hexamethyldisiloxane and tetramethoxysilane for production of silicon-containing coatings

✍ Scribed by J. Pola; R. Alexandrescu; J. Morjan; D. Sorescu

• Book ID: 107905704
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 806 KB
• Volume: 18
• Category: Article
• ISSN: 0165-2370
• DOI: 10.1016/0165-2370(90)85006-9