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Infrared ellipsometry for improved laterally resolved analysis of thin films

✍ Scribed by Hinrichs, Karsten; Furchner, Andreas; Sun, Guoguang; Gensch, Michael; Rappich, Jörg; Oates, Thomas W.H.


Book ID
121831287
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
959 KB
Volume
571
Category
Article
ISSN
0040-6090

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