Ellipsometry as a high-precision technique for subnanometer-resolved monitoring of thin-film structures

✍ Scribed by V. A. Shvets; E. V. Spesivtsev; S. V. Rykhlitskii; N. N. Mikhailov

• Book ID: 111473031
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2009
• Tongue: English
• Weight: 497 KB
• Volume: 4
• Category: Article
• ISSN: 1995-0780
• DOI: 10.1134/s1995078009030082