Infrared absorption and reflection spectroscopic studies of SOI structures formed by oxygen or nitrogen implantation

✍ Scribed by Yu Yuehui; Fang Ziwei; Lin Chenglu; Zou Shichang; P.L.F. Hemment

• Book ID: 119124301
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 494 KB
• Volume: 8
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/0167-577x(89)90135-3