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Infra-red assisted Czochralski growth of silicon crystals

โœ Scribed by U. Ekhult; T. Carlberg; M. Tilli


Book ID
107790270
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
701 KB
Volume
98
Category
Article
ISSN
0022-0248

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Investigation of nitrogen behaviors duri
โœ Xuegong Yu; Deren Yang; Keigo Hoshikawa ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 569 KB

The behaviors of nitrogen during Czochralski (CZ) silicon crystal growth have been investigated in this paper. It is found that the nitrogen impurities in silicon mainly exist as nitrogen pair and nitrogen-oxygen complex. The nitrogen concentration can be exactly determined by Fourier transformed in