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Influences of ion species (Ge+, Sb+, Au2+) on crystallization of amorphous Ge films induced by high energy ion irradiation

โœ Scribed by Setsuo Nakao; Kazuo Saitoh; Masami Ikeyama; Hiroaki Niwa; Seita Tanemura; Yoshiko Miyagawa; Soji Miyagawa


Book ID
114168735
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
375 KB
Volume
127-128
Category
Article
ISSN
0168-583X

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## Abstract Four Ge~2~Sb~2~Te~5~ thin films were prepared by pulsed laser deposition (PLD) at 58, 100, 140, and 190โ€‰mJ/pulse laser energy, respectively. The influence of laser energy on the crystallization of Ge~2~Sb~2~Te~5~ was investigated. The result shows that laser energy has evident effect on