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Influences of deuterium atoms on local bonding structures of SiO2 studied by HREELS

✍ Scribed by Hiroya Ikeda; Yasuyuki Nakagawa; Kenji Sato; Makoto Higashi; Shigeaki Zaima; Yukio Yasuda

Book ID
114086759
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
373 KB
Volume
343-344
Category
Article
ISSN
0040-6090

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## Ε½ . Ε½ . We have demonstrated the characterizations of the local electrical properties of ultrathin 1-4 nm SiO rSi 001 2 Ε½ y5 . structures using a conducting atomic force microscopy with a nanometer-scale resolution in a vacuum 1 = 10 Pa . The measurement in a vacuum enables to reduce the influe