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Influence of π-bonded clusters on the electronic properties of diamond-like carbon films

✍ Scribed by Bounouh, Y.; Thèye, M.L.; Dehbi-Alaoui, A.; Matthews, A.; Cernogora, J.; Fave, J.L.; Colliex, C.; Gheorghiu, A.; Sénémaud, C.


Book ID
122661378
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
540 KB
Volume
2
Category
Article
ISSN
0925-9635

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The effect of the inclusion of silicon atoms in the network of diamond-like carbon (amorphous carbon and hydrogenated amorphous carbon) is studied. Samples of amorphous hydrogenated CSi are deposited by means of a sputter-assisted plasma chemical vapour deposition system in which a carbon target is