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Influence of X-ray exposure on electrical properties of a-Si: H layers

✍ Scribed by Witte, H. ;Barthel, U. ;Garke, B.


Publisher
John Wiley and Sons
Year
1994
Tongue
English
Weight
517 KB
Volume
146
Category
Article
ISSN
0031-8965

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Detailed characterization of extremely thin buried Ge films of monolayer thickness (6 layers) was performed by combination of grazing incidence X-ray reflectivity, crystal truncation rods, and X-ray standing waves. Grazing incidence reflectivity and crystal truncation rods are used to determine the