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Influence of various thickness metallic interlayers on opto-electric and mechanical properties of AZO thin films on PET substrates

โœ Scribed by R.C. Chang; T.C. Li; C.W. Lin


Book ID
116244897
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
882 KB
Volume
258
Category
Article
ISSN
0169-4332

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of