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Structural and opto-electric properties of Ga and F codoped ZnO thin films on PC substrates

✍ Scribed by Shi, Qian; Zhou, Kesong; Dai, Mingjiang; Lin, Songsheng; Hou, Huijun; Wei, Chunbei; Hu, Fang

Book ID
123500606
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
462 KB
Volume
94
Category
Article
ISSN
0042-207X

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of