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Influence of van der Waals and Casimir forces on electrostatic torsional actuators

✍ Scribed by Jian-Gang Guo; Ya-Pu Zhao

Book ID: 115508762
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 349 KB
Volume: 13
Category: Article
ISSN: 1057-7157
DOI: 10.1109/jmems.2004.838390

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